Development and sales of semiconductor manufacturing systems in Japan

UV Curing System UVC-708 – LED Light Source Models

  • UV Curing System UVC-708 - LED Light Source Models

The Minamata Convention aims to protect the human health and the environment from mercury and mercury compounds. Now UV-LED gather attention as alternative of conventional mercury lamp.


UVC-708 use 365nm UV-LED for its lighting system. This is the environment friendly system, – mercury free, long life and power saving design.

Specifications


Model Wafer/Frame size Dimensions
UVC-708 200mm 460mm(W) × 535mm(D) × 325mm(H)

Features


Features
1 Mercury free – 365nm UV-LED
2 Tabletop compact design
3 Room temperature operation
4 Whole surface & uniform exposure for 8inch wafer
5 Low running cost
6 Low N2 cunsumption

Products

Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System

  TWE-200

  TW-300

  TW-700

  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-

  TC-2030

UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series

Semi-Automatic Wafer Mounter

  FM-3343

  FM-903S

  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type

  UVC-200/300

  UVC-200A/300A
-Domestic Only-

  UVC-708

High-Pressure Hg Lamp type

  UVC-408

  UVC-512