Development and sales of semiconductor manufacturing systems in Japan

Grip Ring Cassette

  • Grip Ring Cassette

The Grip ring cassette stores up to 10 grip rings. The material is smoke-brown acrylic. The design enables stacking.

Specifications


Model Dimensions(mm)
GRM-4 163.5mm(W) × 158.5mm(D) × 170mm(H)*
GRM-5 197.5mm(W) × 192.5mm(D) × 170mm(H)*
GRM-6 221.5mm(W) × 216.5mm(D) × 170mm(H)*
GRM-8 259mm(W) × 254.5mm(D) × 180mm(H)*

* Dimensions exclude handle.

Products

Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System

  TWE-200

  TW-300

  TW-700

  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-

  TC-2030

UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series

Semi-Automatic Wafer Mounter

  FM-3343

  FM-903S

  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type

  UVC-200/300

  UVC-200A/300A
-Domestic Only-

  UVC-708

High-Pressure Hg Lamp type

  UVC-408

  UVC-512