Development and sales of semiconductor manufacturing systems in Japan
Japanese　 中文
HOME　＞　Products　＞　Simple Cleaning units: Easy Clean

Simple Cleaning units: Easy Clean

  • Chemical unit

Chemical unit

  • Scrub unit

Scrub unit

  • Dry unit

Dry unit

– Domestic sales only –


Simple Cleaning Units “Easy Clean” are cleaning tool sets for cleaning photomasks of up to 7 inches. Each unit consists of a chemical unit, scrub unit, and dry unit.


Chemical unit: consists of Chemical pot with heater and Rinse pot.
Scrub unit: consists of Scrub cleaning pot, 1st Rinse pot and 2nd Rinse pot for final rinsing.
Dry unit: operates according to the Hot-DIW dry method.
CATALOG DOWNLOAD
CONTACT

Products

Wet Cleaning System

Cassette Cleaning System

　 TCC-803 -Domestic Only-

Photomask Cleaning System

　 TWE-200

　 TW-300

　 TW-700

　 TW-1000 -Domestic Only-

　 TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

　 TWC-200A -Domestic Only-

　 TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

　 Chemical unit -Domestic Only-

　 Scrub unit -Domestic Only-

　 Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

　 QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

　 SH series

Simple temperature controller
-Domestic Only-

　 TC-2030

UV Ozone Cleaner

　 UV-208

　 UV-312

Wafer Mounter

Manual Wafer Mounter

　 FM-224 series

　 PFM-9008

Semi-Automatic Wafer Mounter

　 FM-3343

　 FM-903S

　 FM-664 series

Wafer Expander

　 TEX-21 series

　 TEX-220

　 EX-300 -Domestic Only-

Grip Ring

　 Grip Ring

　 Grip Ring Cassette

　 Grip Ring Case

UV Curing System

UV-LED type

　 UVC-200/300

　 UVC-200A/300A
-Domestic Only-

　 UVC-708

High-Pressure Hg Lamp type

　 UVC-408

　 UVC-512

▲