Development and sales of semiconductor manufacturing systems in Japan

Cassette Cleaning System TCC-803

  • Cassette Cleaning System TCC-803

– Domestic sales only –

The compact TCC-803 cassette cleaning system is ideal for high-mix and low-volume production. The system is designed to perform precision cleaning of the wafer cassettes, carriers, and boxes used in high-end, high-value-added manufacturing processes.

The diversification of semiconductor devices has driven an evolution in design rules at the nanometer scale and boosted demand for greater yields in the context of increasingly sophisticated environments. Contamination control is a critical issue in meeting the resulting challenges.

Technovision’s TCC-803 cassette cleaning system originates from the advanced cleaning knowhow required to support such high-level cleaning tasks.


Features Description
Precision Cleaning Holder travels upward and downward and rotates clockwise and counterclockwise.
Powerful cleaning Spray at a proper angle to the slot.
Hot DIW Cleaning with Hot DI water supplied from the built-in heater.
Dry Dual dry process.
Small foot-print Space-saving upright design.

Cleaning process

Cleaning is performed automatically as follows: “Wash”⇒”Rinse”⇒”Dry-1″⇒”Dry-2″⇒”ESD(Static electricity removal)”.


Cleaning process Description
1:WASH Precision cleaning for complex cassette and box shapes.
2:RINSE Rinse process uses a surfactant in the wash process.
3:DRY-1 Dry process based on air knife blower.
4:DRY-2 Final dry via low flow hot air knife.
5:ESD(Static electricity removal) Removes static electricity to prevent dust re-adhesion.


Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System




  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-


UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series


Semi-Automatic Wafer Mounter



  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type


-Domestic Only-


High-Pressure Hg Lamp type