Development and sales of semiconductor manufacturing systems in Japan

Semi-Automatic Wafer Mounter FM-664 series

  • FM-6648

    FM-6648

  • FM-6643 Custom

    FM-6643
    *Custom specification

This model was developed for both precut and normal tape.
As the industry’s first universal wafer mounter, it can be used for DAF mounting functions while also serving as a dedicated wafer mounter for precut or normal tape.

Specifications


Model Wafer/Frame size Dimensions
FM-6648 up to 8 inch 1,220mm(W) x 660mm(D) x 1,620mm(H)
FM-6643
-Domestic sales only-
up to 12 inch 1,710mm(W) x 975mm(D) x 1,570mm(H)

Features


1 User-settable parameters, including mounting pressure, speed, and temperature.
2 Variable mounting pitch for normal tape.
3 Low tension mounting.
4 Bubble-free mounting.
5 Customizable for hot wafer chucks.

Optional item


Chuck table heater
Chuck table heater

Products

Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System

  TWE-200

  TW-300

  TW-700

  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-

  TC-2030

UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series

Semi-Automatic Wafer Mounter

  FM-3343

  FM-903S

  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type

  UVC-200/300

  UVC-200A/300A
-Domestic Only-

  UVC-708

High-Pressure Hg Lamp type

  UVC-408

  UVC-512