Development and sales of semiconductor manufacturing systems in Japan

Super Clean Heater:QH series

  • QH series

– Domestic sales only –


This heater heats the target instantaneously and is immune to fluid contamination. Two heater types are offered: the QH series and the SH series.

Features


The QH series for ultrapure DI water features a pure quartz heating element.


Features
1 Available in 16 models with heating capacities ranging from 1 to 36 KW.
2 Wetted surfaces made of quartz and PTFE.
3 Drift-water-free construction.
4 Compact, safe, durable.
Model Specifications Size Fitting
W×D×H INLET/OUTLET
QH-1001 1.0 KW 100/200 V 1 phase 80mm × 390mm Rc3/8
QH-1501 1.5 KW 100/200 V 1 phase 80mm × 490mm Rc3/8
QH-2001 2.0 KW 200 V 1 phase 80mm × 555mm Rc3/8
QH-3001 3.0 KW 200 V 1 phase 80mm × 555mm Rc3/8
QH-1003 3.0 KW 200 V 3 phase 120mm × 400mm Rc3/8
QH-1503 4.5 KW 200 V 3 phase 120mm × 500mm Rc3/8
QH-2003 6.0 KW 200 V 3 phase 120mm × 565mm Rc1/2
QH-4003 12.0 KW 200 V 3 phase 120mm × 870mm Rc1/2
QH-1006 6.0 KW 200 V 3 phase 146mm × 420mm Rc1/2
QH-1506 9.0 KW 200 V 3 phase 146mm × 520mm Rc1/2
QH-2006 12.0 KW 200 V 3 phase 146mm × 585mm Rc1/2
QH-3006 18.0 KW 200 V 3 phase 146mm × 750mm Rc3/4
QH-4006 24.0 KW 200 V 3 phase 146mm × 890mm Rc3/4
QH-2009 18.0 KW 200 V 3 phase 192mm × 605mm Rc3/4
QH-3009 27.0 KW 200 V 3 phase 192mm × 770mm Rc3/4
QH-4009 36.0 KW 200 V 3 phase 192mm × 910mm Rc3/4

Products

Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System

  TWE-200

  TW-300

  TW-700

  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-

  TC-2030

UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series

Semi-Automatic Wafer Mounter

  FM-3343

  FM-903S

  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type

  UVC-200/300

  UVC-200A/300A
-Domestic Only-

  UVC-708

High-Pressure Hg Lamp type

  UVC-408

  UVC-512