Development and sales of semiconductor manufacturing systems in Japan

UV Curing System UVC-408 – High pressure Hg Lamp Model

  • UVC-408
  • UVC-408

UV curing system is an equipment to ease of peeling UV-tape after UV exposure. The tape is UV tape for surface protection during back grinding and dicing tape in the process of the wafer processing.


This high-pressure Hg lamp type UV curing system uses a conventional UV lamp to achieve stable curing results.


Thanks to Technovision’s unique design, these compact systems ensure uniform exposures at lower temperatures. An N2 purge function uses significantly lower N2 volumes compared to existing systems.


These models improve the efficiency of the manufacturing process by reducing the system operating costs and minimizing use of valuable clean room floor space.

Specifications


Model Wafer/Frame size Dimensions
UVC-408 200mm 400mm(W) × 665mm(D) × 435mm(H)

Features


1 Compact design.
2 Uniform exposure while rotating the Workpiece.
3 Low temperature operation similar to that of a low-pressure lamp machine.
4 Features a low consumption N2 purge function.

Products

Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System

  TWE-200

  TW-300

  TW-700

  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-

  TC-2030

UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series

Semi-Automatic Wafer Mounter

  FM-3343

  FM-903S

  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type

  UVC-200/300

  UVC-200A/300A
-Domestic Only-

  UVC-708

High-Pressure Hg Lamp type

  UVC-408

  UVC-512