Development and sales of semiconductor manufacturing systems in Japan

UV Curing System UVC-200/300 – LED Light Source Models

  • UVC-200/300
  • UVC-200/300
  • UVC-200/300

This UV curing system facilitates the peeling of UV tape after UV exposure. The tape is UV tape for surface protection during back grinding and the dicing of tape in the wafer processing process.


UV-LED curing systems use 365 nm wavelength LED (light emitting diode) light sources for UV exposure. LEDs provide numerous performance benefits.


Thanks to the high-output LED drivers and water cooling systems developed by Technovision, we can provide reliable exposure outputs of 250 mW/cm2 (at a 10 mm working distance).

Specifications


Model Wafer/Frame size Dimensions
UVC-200 200mm 750mm(W) × 640mm(D) × 575mm(H)
UVC-300 300mm 750mm(W) × 640mm(D) × 575mm(H)

Features


1 Room temperature exposure.
2 Low operating costs.
3 Long life.
4 Low power consumption.
5 Safety when replacing light sources.
6 N2 purge function.
7 Tabletop design.

Features

Products

Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System

  TWE-200

  TW-300

  TW-700

  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-

  TC-2030

UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series

Semi-Automatic Wafer Mounter

  FM-3343

  FM-903S

  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type

  UVC-200/300

  UVC-200A/300A
-Domestic Only-

  UVC-708

High-Pressure Hg Lamp type

  UVC-408

  UVC-512