Development and sales of semiconductor manufacturing systems in Japan

Wafer Expander EX-300

  • Wafer Expander EX-300

– Domestic sales only –


The motorized expander features an electric motor drive system to travel the expansion stage.


A recent diversification in processes including wafer types and thickness, device type, and dicing methods has made it more challenging to achieve the performance required for Die Matrix Expander systems.


The EX-300 adopts a motor drive system featuring excellent repeatability and high accuracy for the expansion stage travling.

Specifications


Model Wafer size Dimensions
EX-300 up to 12 inch 750mm(W) × 760mm(D) × 615mm(H)

Features


Features
1 The expansion stroke can be set in 0.1 mm increments.
2 Expansion speed can be varied.
3 Recipe function for expansion operating speeds.
4 PLC control, touch panel operation.
5 The heated expansion stage facilitates high-ratio expansion.
6 Expanded film and wafers can be gripped automatically.
7 Features an automatic cut function.
Before→After

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for DI water
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