Development and sales of semiconductor manufacturing systems in Japan

Super Clean Heater:SH Series

  • SH Series

– Domestic sales only –


This heater heats the target instantaneously and is immune to fluid contamination. Two heater types are offered: the QH series and the SH series.

Features


The SH series for use with clean dry air or inert gas is equipped with a heating element made of electropolished SUS316 stainless steel.

Features
1 Available in 6Six models, available with heating capacities ranging from 500 to 24002,400 W.
2 Electropolished stainless steel heating section and fluid paths.
3 Compact, safe, and highly efficient design.
Model Specifications Size Fitting
W×D×H INLET/OUTLET
SH-500 500 W 200 V 1 phase 100mm × 300mm Rc3/8
SH-800 800 W 200 V 1 phase 100mm × 300mm Rc3/8
SH-1000 1000 W 200 V 1 or 3 phase 100mm × 400mm Rc1/2
SH-1500 1500 W 200 V 1 or 3 phase 100mm × 400mm Rc1/2
SH-1800 1800 W 200 V 1 or 3 phase 100mm × 500mm Rc3/4
SH-2400 2400 W 200 V 1 or 3 phase 100mm × 500mm Rc3/4

Products

Wet Cleaning System

Cassette Cleaning System

  TCC-803 -Domestic Only-

Photomask Cleaning System

  TWE-200

  TW-300

  TW-700

  TW-1000 -Domestic Only-

  TWC-302 -Domestic Only-

Fully Automatic Photomask Cleaning System -Domestic Only-

  TWC-200A -Domestic Only-

  TWC-304A -Domestic Only-

Simple Cleaning Units
-Domestic Only-

  Chemical unit -Domestic Only-

  Scrub unit -Domestic Only-

  Dry unit -Domestic Only-

Cleaning Chemicals

Super Clean Heaters -Domestic Only-

for DI water
-Domestic Only-

  QH series

for Inert Gas/Clean Dry Air
-Domestic Only-

  SH series

Simple temperature controller
-Domestic Only-

  TC-2030

UV Ozone Cleaner

Wafer Mounter

Manual Wafer Mounter

  FM-224 series

  PFM-9008

Semi-Automatic Wafer Mounter

  FM-3343

  FM-903S

  FM-664 series

Wafer Expander

Grip Ring

UV Curing System

UV-LED type

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  UVC-200A/300A
-Domestic Only-

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High-Pressure Hg Lamp type

  UVC-408

  UVC-512