Product:UV Ozone Cleaner − Technovision Inc.
UV Ozone Cleaner
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UV Ozone Cleaner

UV Ozone Cleaner is a cleaning equipment for semiconductor industry which is extremely effective in removal of molecular organic contamination from workpiece surface and in surface treatment via ultraviolet(UV) emittted at wavelength of 184.9nm and 253.7nm.

UV Ozone Cleaner
merit
1.UV irradiation uniformly
Technovision's UV Ozone Cleaner equipped with a high density UV
grid shaped low-pressure mercury lamp.
2.Easy operation
Set the exposure time and Push the "START" button.
3.Simple utility
Electrical power and exhaust.
UV curing
UV Ozone Cleaner feature

■Change of wettability

■Change of contact angle

Wettability will be changed after UV Ozone cleaning compared with previous.

Contact angle will be changed after UV Ozone cleaning compared with previous.

Change of wettability Change of contact angle
Parameters
Irradiation time: 5 min/Irradiation distance: 10 mm
Tool: UV-208/Sample: Si wafer
Parameters
Irradiation time: 5 min/Irradiation distance: 10 mm
Tool: UV-208/Sample: Si wafer

Drop of water is spread after UV Ozone cleaning.
Area ratio is increased.

The contact angle is low after UV Ozone cleaning.
 

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