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Technovision TOP > Products > Double-sided Mask Cleaning System TWC-300
Mask Cleaning System TWC-300
Summary

"TWC-300" mask cleaning system is a full cleaning equipment to remove the resist residues and larger than 1μm particles adhering to the mask.



Resist removal

Resist adhering to the mask have two types of contamination which are strong contamination and light contamination adhered in the normal process. Strong contamination is unknown the using track record stored a long period of time without being washed or for testing purposes.

Model TWC-300 has been achieved to improve the cleaning efficiency by using a suitable cleaning chemical depending on the contamination.



Particle removal

Particles adhering to the photomask is transferred to work as part of a pattern that almost shut down the light at the time of exposure becomes cause of the occurrence of defective products. In order to prevent problems like this, Technovision developed a model TWC-300 based on the thought of "Managing cleaning of the mask is an important part of the exposure process".

features
Mask cleaning system
  • The cost of about 10M yen is reduced every month.*
  • Complete removal of Resist and Resist residue.
  • Complete removal of particles larger than 1 μm
  • The mask can be permanently used
  • The latest developed chemical is eco friendly and mild
  • Release from the danger Hot sulfuric acid
    and Sulfuric acid-hydrogen peroxide(Piranha clean)
  • Scrub washing is non-scratch washing on Mask surface
  • Stand-alone system suitable double-sided Mask cleaning
  • Space saving

*The masks assume change when xpose 100 times a day and
5 or 6 kinds of masks are used for the one product.
It calculated for 50,000 to 80,000 yen a mask.

purpose

■Best suited for cleaning of photomask larger than 1μm design rule L / S(Line and space)

such as FPD (flat panel display), MEMS devices, fine patterns PCB / FPC / TAB, compound semiconductor, electronic components and thin film.

■Utilities

DIW
5-6 liters / min.  0.1-0.15MPa  Fitting~Rc1/2
Dry air
Clean dry air  600-800 liters/ min.
0.3-0.4MPa  Fitting~Rc3/4
Air
0.4-0.5MPa  Fitting~φ6  quick fitting
Water drain
40A(O.D.48mm PVC)
Exhaust
0.15-0.20Pa  FittingØ100mm100mm
Electricity
200V  15A  3p
Dimension(mm)
1100(W)×1100(D)×1850(+150  HEPA unit)
Net Weight
Approx. 400kg
cleaning/rinse


Please contact overseas sales and marketing team for more product information.