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Technovision TOP > Products > Photomask Cleaning System
Photomask Cleaning System

Cleaned photomasks are essential for improved product yield. Technovision's expertise in cleaning and drying techniques helps you maintain high standards of cleanness for any procedure involving photomasks.

The Photomask Cleaning System is available in four models that can be used with a wide range of small to large photomasks.

Features
  
Features
1
Allows fast scrub cleaning, rinsing, and drying of photomasks, all with a single system.
2
2 Provides even, precise cleaning with special brushes that leave no scratches on mask patterns.
3
Vertically places and transports photomasks to minimize stress during transport.
4
Most suited to cleaning of substrates for low-volume production of various devices and R&D.
5
Equipped with dedicated work holders for individual sizes and free-size work holders. Parts that come in contact with workpieces are made of plastic.
Standard device holder Free-size fits-all device holder Customized device holder

Standard device holder

Free-size fits-all device holder

Customized device holder

Uses

Photomasks:

Semiconductors, LCDs, OELDs, CFs, Thin Film Devices, IC Packaging, PWBs, PCBs, FPCs, etc., For use in cleaning plate-like substrates.

■Options

Surfactant injection unit, HEPA/ULPA unit, ionizer, hot air knife, and DI water heating unit Upright Compact Model

TWE-200
Model TWE-200
Size
Cleans devices up to 300 mm×300 mm
Dimensions
980 mm (W)×720 mm (D)×1,760 mm (H)
Weight
250Kg
TW-300
Model TW-300
Size
Cleans devices up to 360 mm×460 mm
Dimensions
1,070 mm (W)×700 mm (D)×1,815 mm (H)
Work height
1,200mm
Weight
280Kg
Model TW-700
Model TW-700
Size
Cleans devices up to 620 mm×720 mm
Dimensions
1,810 mm (W)×880 mm (D)×1,590 mm (H)
Work height
1,240mm
Weight
580Kg
For Large Photomasks and PDPs
Model TW-700
Model TW-1000
Size
Cleans devices up to 1,300 mm×1,700 mm
Dimensions
17,200 mm (W)×1,200 mm (D)×2,700 mm (H)

* Photomask cleaning system is custom-built according to the size of your photomasks. Please contact us for more details.

* The mask loading/unloading section is also custom-built to meet your requirements. Please contact us for more details.

Please contact overseas sales and marketing team for more product information.

Technovision | Semiconductor Manufacturing, Cleaning System, Post-process

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